Compact probe for atomic-force microscopy and atomic-force microscope including such a probe
US10527645B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 12, 2016 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Jul 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/58
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.