Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus
US10533251B2 · kind B2 · utility
1Cited by
17References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 31, 2015 |
| Grant date | Jan 14, 2020 |
| Priority date | — |
| Expiry date | Apr 30, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45589
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A showerhead module adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead module adjustment mechanism being dynamically operable to adjust a planarization of a faceplate of the showerhead module with respect to an upper surface of a substrate pedestal module adjacent the faceplate in the semiconductor substrate processing apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.