Balancing RF circuit and control for a cross-coupled SIMO distribution network
US10536130B2 · kind B2 · utility
0Cited by
20References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2018 |
| Grant date | Jan 14, 2020 |
| Priority date | — |
| Expiry date | Aug 25, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A single input multiple output plasma control system includes a splitter that receives a single input and generates multiple outputs. Each output from the splitter is provided to a load. The splitter includes branch circuits connected between selected splitter outputs. The branch circuits control voltage, current, power, frequency, or phase between each branch to enable controlling a predetermined relationship between the voltage, current, power, impedance, frequency, or phase measured at each load.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.