MKS Instruments, Inc.
543Patents
358Active
543Granted
59Portfolio score
Filing activity: Nov 17, 1975 → Mar 29, 2024 · 105 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4008619A | Vacuum monitoring | Emerging Cross-Sectional Technologies | 233 | Expired |
| US6161576A | Integrated turbo pump and control valve system | Emerging Cross-Sectional Technologies | 166 | Expired |
| US5714738A | Apparatus and methods of making and using heater apparatus for heating an object having two-dimensional or three-dimensional curvature | Electricity | 154 | Expired |
| US7252011B2 | Surface area deposition trap | Physics | 137 | Expired |
| US7764140B2 | Radio frequency power delivery system | Electricity | 127 | Active |
| US5868159A | Pressure-based mass flow controller | Emerging Cross-Sectional Technologies | 122 | Expired |
| US8040068B2 | Radio frequency power control system | Electricity | 120 | Active |
| US7122965B2 | Methods and apparatus for calibration and metrology for an integrated RF generator system | Electricity | 103 | Expired |
| US7602127B2 | Phase and frequency control of a radio frequency generator from an external source | Electricity | 98 | Active |
| US7728602B2 | Harmonic derived arc detector | Electricity | 90 | Active |
| US7437204B2 | Method and apparatus for monitoring host to tool communications | Emerging Cross-Sectional Technologies | 85 | Active |
| US8773019B2 | Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing | Electricity | 83 | Active |
| US8395322B2 | Phase and frequency control of a radio frequency generator from an external source | Electricity | 83 | Active |
| US5965821A | Pressure sensor | Physics | 83 | Expired |
| US8576013B2 | Power distortion-based servo control systems for frequency tuning RF power sources | Electricity | 82 | Active |
| US8110991B2 | Phase and frequency control of a radio frequency generator from an external source | Electricity | 82 | Active |
| US5662143A | Modular gas box system | Emerging Cross-Sectional Technologies | 81 | Expired |
| US5820641A | Fluid cooled trap | Emerging Cross-Sectional Technologies | 80 | Expired |
| US5827370A | Method and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnace | Chemistry; Metallurgy | 79 | Expired |
| US7872523B2 | Radio frequency (RF) envelope pulsing using phase switching of switch-mode power amplifiers | Electricity | 78 | Active |
| US6089537A | Pendulum valve assembly | Mechanical Engineering; Lighting; Heating | 78 | Expired |
| US4785669A | Absolute capacitance manometers | Physics | 74 | Expired |
| US8781415B1 | Distortion correction based feedforward control systems and methods for radio frequency power sources | Electricity | 73 | Active |
| US7777567B2 | RF power amplifier stability network | Electricity | 70 | Active |
| US7151976B2 | Multivariate control of semiconductor processes | Emerging Cross-Sectional Technologies | 68 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.