Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies

US10539587B2 · kind B2 · utility

Assignee

• Infineon Technologies Dresden GmbH & Co. KG · DE

Inventors

• Thoralf Kautzsch · Dresden, DE
• Steffen Bieselt · Wehlen, DE

Key dates

• Filing date: Feb 1, 2017
• Grant date: Jan 21, 2020
• Expiry date: Jan 11, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/125
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An accelerometer may include a seismic mass to flex based on acceleration components perpendicular to a surface of a substrate. The seismic mass may include a first electrode and a portion of the substrate. A first surface of the seismic mass may be adjacent to a first cavity in the substrate, and a second surface of the seismic mass being adjacent to a second cavity. The first surface of the seismic mass and the second surface of the seismic mass may be on opposite sides of the seismic mass. The accelerometer may include a second electrode separated from the second surface of the seismic mass by at least the second cavity.