High magnetic field scanning probe microscope employing liquid helium-free room-temperature bore superconducting magnet
US10539590B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2016 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Dec 16, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2223/0161
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope of the present disclosure includes: a room-temperature bore superconducting magnet including a liquid helium-consumption free closed-cycle cooling system, a superconducting magnet, and a chamber having a room-temperature bore; and a scanning probe microscope including a scanning head, a vacuum chamber, and a vibration isolation platform; and a computer control system. The room-temperature bore superconducting magnet is cooled by the cryogen-free closed-cycle cooling system which eliminates the dependence on liquid helium for high magnetic field operation. There is no physical contact between the scanning probe microscope and the superconducting magnet connected to the closed-cycle cooling system. The scanning probe microscope can achieve atomic-scale spatial resolution. The temperature of the scanning probe microscope is not restricted by the low temperature conditions for operation of the superconducting magnet. The scanning probe microscope and the vacuum chamber can achieve high-temperature baking independent of the superconducting magnet for ultra-high vacuum conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.