Measuring device for a scanning probe microscope, scanning probe microscope and method for operating the scanning probe microscope

US10539591B2 · kind B2 · utility

Assignee

• Bruker Nano, Inc. · US

Inventors

• Detlef Knebel · Berlin, DE
• Torsten Jähnke · Berlin, DE
• Jonas Hiller · Bern, CH

Key dates

• Filing date: Nov 30, 2018
• Grant date: Jan 21, 2020
• Expiry date: Nov 30, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q70/16
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a measuring device for a scanning probe microscope including a measuring probe a first probe holding device on which the measuring probe is arranged, a detection device including a measurement light source which is adapted to provide light beams directed toward the measuring probe, a sensor device which is adapted, during the operation to receive measurement light beams reflected from the measuring probe. A first measuring arrangement in which the first probe holding device with the measuring probe is arranged in a first position spaced from the detection device, and a second measuring arrangement is formed in which a lengthening device is changeably arranged between the detection device and the measuring probe which lengthens the respective optical beam path for the light beams and the measurement light beams in such a manner that the first probe holding device or a second probe holding device which is different from the first probe holding device is arranged with the measuring probe at a second position spacing from the detection device which is greater than the first position spacing.