Patent · US Active

Method and apparatus for transmission electron microscopy

US10541108B2 · kind B2 · utility

0Cited by

3References

16Claims

0Family size

Assignee

IMEC VZW · BE

Inventors

Umberto Celano · Kessel-Lo, BE
Kristof Paredis · Oud-Heverlee, BE
Wilfried Vandervorst · Mechelen, BE

Key dates

Filing date	Feb 20, 2018
Grant date	Jan 21, 2020
Priority date	—
Expiry date	Feb 20, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31747
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The disclosure is related to a method and apparatus for transmission electron microscopy wherein a TEM specimen is subjected to at least one thinning step by scratching at least an area of the specimen with an SPM probe, and wherein the thinned area is subjected to an SPM acquisition step, using the same SPM probe or another probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.