Acoustic resonator and method of manufacturing the same
US10541668B2 · kind B2 · utility
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4References
17Claims
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Key dates
| Filing date | Mar 30, 2016 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Dec 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonating part including a first electrode, a second electrode, and a piezoelectric layer; and a plurality of seed layers disposed on one side of the resonating part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.