Method for operating a pressure system of a device for imaging, analyzing and/or processing an object and a device for carrying out the method
US10546716B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2019 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Feb 27, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24585
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Operating a pressure system of a device for imaging, analyzing and/or processing an object, and a particle beam device for carrying out this method. In particular, the particle beam device is an electron beam device and/or an ion beam device. The method may include disconnecting a pump from a pressure reservoir, connecting the pressure reservoir to a vacuum chamber, measuring a reservoir pressure existing in the pressure reservoir, determining a first pressure value of the reservoir pressure at a first time and a second pressure value of the reservoir pressure at a second time, determining a functional relationship between the first pressure value of the reservoir pressure and the second pressure value of the reservoir pressure, extrapolating the functional relationship for times later than the second time, determining a threshold time using the extrapolated functional relationship, and determining a remaining time period until the reservoir pressure reaches the pressure threshold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.