Patent · US Active

One-piece process kit shield

US10546733B2 · kind B2 · utility

4Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Kirankumar Neelasandra SAVANDAIAH · Bengaluru, IN
Ryan Edwin Hanson · Livonia, US
Ruxiao An · Palo Alto, US

Key dates

Filing date	Dec 7, 2015
Grant date	Jan 28, 2020
Priority date	—
Expiry date	Jun 24, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3447
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.