Resonant network for plasma power supply and power supply device for plasma generator
US10548211B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Sep 20, 2018 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Sep 20, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B70/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a resonant network for plasma power supply, which is connected between a power supply unit and an output unit. The resonant network includes a resonant inductor connected in series with the power supply unit, a resonant capacitor connected in parallel with the output unit and connected in series with the resonant inductor, and a passive element connected in series with the output unit and the resonant inductor and connected in parallel with the resonant capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.