Substrate transfer robot
US10549427B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 31, 2018 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Aug 31, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/681
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transfer robot delivers/receives a substrate to/from the carrier for the substrate, coupled to an opening of the load port on a first side of the load port, from a second side opposite to the first side via the load port through the opening, and the substrate transfer robot includes a hand holding the substrate, a robot arm coupled to the hand and displacing the hand, an imaging device attached to the hand or the robot arm, and a controller configured to control operation of the robot arm and the imaging device. Controller acquires a captured image including a peripheral edge of the opening and carrier coupled to the opening and performs image processing on captured image to detect deviation of the coupling position of the carrier from a predetermined reference coupling position, the peripheral edge and the carrier being captured from the second side by the imaging device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.