Patent · US Active

Photoacoustic gas sensor and method

US10551356B2 · kind B2 · utility

1Cited by

9References

7Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

David Tumpold · Tauberbischofsheim, DE
Christoph Glacer · Munich, DE

Key dates

Filing date	Oct 23, 2017
Grant date	Feb 4, 2020
Priority date	—
Expiry date	Mar 31, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/02809
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.