SEM image acquisition device and SEM image acquisition method
US10553391B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 9, 2016 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Sep 9, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An SEM image acquisition device including a scanning signal generation unit configured to rotate a scanning direction of the electron beam to be scanned on the sample and generate a scanning signal to be emitted on a position on the sample corresponding to a same region and same pixels on the sample; a deflection device configured to emit the electron beam on a position on the sample corresponding to the same region and the same pixels on the sample, on the basis of the scanning signal generated by the scanning signal generation unit; a detection and amplification unit configured to detect and amplify a signal from the position on the sample corresponding to the same region and the same pixels on the sample, on which the electron beam was emitted by being deflected by the deflection device; and an image generation unit configured to generate an image from when the position on the sample corresponding to the same region and the same pixels on the sample is irradiated, on the basis of the signal detected and amplified by the detection and amplification unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.