Patent assignee · JP · COMPANY

HOLON CO., LTD.

5Patents
4Active
5Granted
40Portfolio score

Filing activity: Jan 31, 2002 → Sep 9, 2016 · 3 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6686591B2 Apparatus for inspecting mask Electricity 29 Expired
US7375328B2 Charged particle beam apparatus and contamination removal method therefor Electricity 4 Active
US7519942B2 Pattern specification method and pattern specification apparatus Physics 2 Active
US7409309B2 Method of deciding the quality of the measurement value by the edge width Physics 1 Active
US10553391B2 SEM image acquisition device and SEM image acquisition method Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.