HOLON CO., LTD.
5Patents
4Active
5Granted
40Portfolio score
Filing activity: Jan 31, 2002 → Sep 9, 2016 · 3 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6686591B2 | Apparatus for inspecting mask | Electricity | 29 | Expired |
| US7375328B2 | Charged particle beam apparatus and contamination removal method therefor | Electricity | 4 | Active |
| US7519942B2 | Pattern specification method and pattern specification apparatus | Physics | 2 | Active |
| US7409309B2 | Method of deciding the quality of the measurement value by the edge width | Physics | 1 | Active |
| US10553391B2 | SEM image acquisition device and SEM image acquisition method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.