Active matrix substrate and demultiplexer circuit
US10558097B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2018 |
| Grant date | Feb 11, 2020 |
| Priority date | — |
| Expiry date | Sep 7, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2310/0297
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a demultiplexer circuit, each unit circuit includes at least n TFTs 30 and n branch lines connected with one video signal line. Each TFT 30 includes an oxide semiconductor layer 7, an upper gate electrode 11 provided on the oxide semiconductor layer with a gate insulating layer 9 interposed therebetween, and a first electrode 13 and a second electrode 15. The demultiplexer circuit further includes a first interlayer insulating layer 21 covering the oxide semiconductor layer and the upper gate electrode and a second interlayer insulating layer 23 provided on the first interlayer insulating layer. The first electrode 13 is provided between the first interlayer insulating layer 21 and the second interlayer insulating layer 23 and is in contact with the oxide semiconductor layer inside a first contact hole CH1 formed in the first interlayer insulating layer. The second electrode 15 is provided on the second interlayer insulating layer 23 and is in contact with the oxide semiconductor layer inside a second contact hole CH2 formed in the first and second interlayer insulating layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.