Patent · US Active

Memory device and forming method thereof

US10559592B1 · kind B1 · utility

8Cited by
6References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 2018
Grant dateFeb 11, 2020
Priority date
Expiry dateSep 10, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/7684
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate and a first alternating conductor/dielectric stack disposed on the substrate and a dielectric layer disposed over the first alternating conductor/dielectric stack. A second alternating conductor/dielectric stack is disposed on the dielectric layer. The NAND memory device includes one or more array common source contacts extending orthogonally with respect to the surface of the substrate through the first layer stack and the second layer stack, wherein at least one of the one or more array common source contacts includes a first conductive contact and a second conductive contact that is disposed over and electrically connected with the first conductive contact.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.