Microelectromechanical microphone

US10560771B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Alfons Dehe · Reutlingen, DE
• Gerhard Metzger-Brueckl · Geisenfeld, DE
• Johann Strasser · Schierling, DE
• Arnaud Walther · Grenoble, FR
• Andreas Wiesbauer · Powirtschach, AT

Key dates

• Filing date: Aug 1, 2018
• Grant date: Feb 11, 2020
• Expiry date: Aug 1, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R2410/03
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

In accordance with an embodiment, microelectromechanical microphone includes a holder and a sound detection unit carried on the holder. The sound detection unit includes a planar first membrane, a planar second membrane arranged at a distance from the first membrane, a low-pressure chamber formed between the first membrane and the second membrane, a reduced gas pressure relative to normal pressure being present in the low-pressure chamber, a reference electrode arranged at least in sections in the low-pressure chamber, where the first and second membranes are displaceable relative to the reference electrode by sound waves to be detected, the reference electrode includes a planar base section and a stiffening structure provided on the base section, and the stiffening structure is provided on a side of the base section that faces the first membrane or/and on a side of the base section that faces the second membrane.