Metal oxy-flouride films based on oxidation of metal flourides
US10563303B2 · kind B2 · utility
2Cited by
40References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2018 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | May 19, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article comprises a body having a coating. The coating comprises a Y-O-F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.