Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test

US10571487B2 · kind B2 · utility

Assignee

• FormFactor Beaverton, Inc. · US

Inventors

• Daniel Bock · Heidelberg, DE
• Tim Cleary · Portland, US

Key dates

• Filing date: Nov 22, 2017
• Grant date: Feb 25, 2020
• Expiry date: Nov 22, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/3025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test (DUT). A contact engine includes a flexible dielectric membrane having a first surface and a second surface and a plurality of probes supported by the flexible dielectric membrane. The plurality of probes are oriented to contact a plurality of contact locations on the DUT. Each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations. The contact engine further includes at least one membrane antenna supported by the flexible dielectric membrane. A probe head assembly includes the contact engine. A probe system includes the probe head assembly. Associated methods include methods of utilizing the contact engine.