Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices

US10571681B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Roland Meier · Holzwickede, DE
• Klemens Pruegl · Regensburg, DE
• Bernhard Winkler · Birkenfeld, DE
• Thomas Popp · Rockenhausen, DE
• Raimund Foerg · Straubing, DE

Key dates

• Filing date: Aug 22, 2017
• Grant date: Feb 25, 2020
• Expiry date: Jan 13, 2038

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/047
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.