Patent · US Active

Microelectromechanical microphone

US10575101B2 · kind B2 · utility

5Cited by

2References

24Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Arnaud Walther · Grenoble, FR
Alfons Dehe · Reutlingen, DE
Gerhard Metzger-Brueckl · Geisenfeld, DE
Johann Strasser · Schierling, DE
Carsten Ahrens · Birkenfeld, DE

Key dates

Filing date	Feb 15, 2018
Grant date	Feb 25, 2020
Priority date	—
Expiry date	Feb 15, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A microelectromechanical microphone includes a reference electrode, a first membrane arranged on a first side of the reference electrode and displaceable by sound to be detected, and a second membrane arranged on a second side of the reference electrode, said second side being situated opposite the first side of the reference electrode, and displaceable by sound to be detected. A region of one from the first and second membranes that is displaceable by sound relative to the reference electrode, independently of said region's position relative to the reference electrode, can comprise a planar section and also an undulatory section adjoining the planar section and arranged in a region of overlap one of the first membrane or the second membrane with the other one of the first membrane and or the second membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.