X-ray emission spectrometer system
US10578566B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2019 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Apr 1, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.