On-board supply system for a stage assembly

US10578977B2 · kind B2 · utility

Assignee

• NIKON CORPORATION · JP

Inventors

• Chetan Mahadeswaraswamy · San Francisco, US
• Johnathan Agustin Marquez · San Diego, US
• Joseph P. Rossi · San Jose, US

Key dates

• Filing date: Feb 21, 2018
• Grant date: Mar 3, 2020
• Expiry date: Feb 21, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67109
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).