Method for producing a stack of layers for a matrix thermal sensor
US10580956B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 12, 2018 |
| Grant date | Mar 3, 2020 |
| Priority date | — |
| Expiry date | Nov 12, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/345
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method produces a matrix of pixels of a thermal sensor, suitable for passive addressing. The matrix of pixels includes a layer including a first series of electrically conducting strips, forming charge collection macro-electrodes; a layer including a pyroelectric material; and a layer including a second series of electrically conducting strips, forming heating strips. The method includes a step of transfer of one on the other of a first and a second elementary stack, the first elementary stack including the first series of strips, and the second elementary stack including the second series of strips. This method makes it possible to relax the manufacturing constraints of the series of strips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.