Patent · US Active

Titanium-containing film forming compositions for vapor deposition of titanium-containing films

US10584039B2 · kind B2 · utility

2Cited by

6References

17Claims

0Family size

Assignee

L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

Antonio Sanchez · Tsukuba, JP
Jean-Marc Girard · Versailles, FR
Grigory Nikiforov · Bound Brook, US
Nicolas Blasco · Grenoble, FR

Key dates

Filing date	Nov 30, 2017
Grant date	Mar 10, 2020
Priority date	—
Expiry date	Feb 23, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R33/46
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Titanium-containing film forming compositions comprising titanium halide-containing precursors are disclosed. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Titanium-containing films on one or more substrates via vapor deposition processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.