Patent · US Active

MEMS microphone

US10589990B2 · kind B2 · utility

12Cited by

5References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Ulrich Krumbein · Rosenheim, DE
Gerhard Metzger-Brueckl · Geisenfeld, DE
Johann Strasser · Schierling, DE
Juergen Wagner · Nittendorf, DE
Arnaud Walther · Grenoble, FR

Key dates

Filing date	Sep 18, 2018
Grant date	Mar 17, 2020
Priority date	—
Expiry date	Sep 18, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH04R1/2807
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

In accordance with an embodiment, a MEMS microphone includes a sound detection unit having a first membrane, a second membrane arranged at a distance from the first membrane, a low-pressure region arranged between the first membrane and the second membrane, a gas pressure that is reduced in relation to normal pressure being present in said low-pressure region, a counter electrode arranged in the low-pressure region, and a sound through-hole, which extends through the sound detection unit in a thickness direction of the sound detection unit; and a valve provided at the sound through-hole, said valve being configured to adopt a plurality of valve states, wherein a predetermined degree of transmission of the sound through-hole to sound is assigned to each valve state.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.