Control of additive turnover in an electrodeposition solution
US10590560B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 22, 2018 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | Sep 14, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/66
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for measuring additive turnover in a solution, such as an electrodeposition solution, are provided. Methods for measuring an age or lifetime of a solution, such as an electrodeposition solution, are also provided. Methods can include providing a solution containing an organic additive and a plurality of breakdown products of the organic additive, in which the plurality of breakdown products include at least one active component and at least one inactive component and measuring the concentration of the at least one inactive component in the solution. Methods can further include determining additive turnover of the solution based on the concentration of the at least one inactive component in the solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.