Capacitive sensor and manufacturing method thereof
US10591523B2 · kind B2 · utility
7Cited by
0References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 2015 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | May 29, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/33
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive sensor is disclosed. The capacitive sensor includes a substrate, a first electrode and a second electrode formed on the substrate, an insulation layer formed on the substrate on which the first electrode and the second electrode are formed, and a sensing layer that is formed on the insulation layer and includes graphene.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.