Cell-aware root cause deconvolution for defect diagnosis and yield analysis
US10592625B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2018 |
| Grant date | Mar 17, 2020 |
| Priority date | — |
| Expiry date | Oct 26, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31718
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Logic diagnosis is performed on failing reports of defective integrated circuits to derive a diagnosis report for each of the failing reports which comprise information of suspects. The suspects comprise cell internal suspects and interconnect suspects. A probability distribution of root causes for causing the defective integrated circuits is determined to maximize a likelihood of observing the diagnosis reports based on a probability for each of the suspects given each of the root causes and a probability for each of the diagnosis reports given each of the suspects. The probability for each of the diagnosis reports given each of the cell internal suspects is weighted higher than the probability for each of the diagnosis reports given each of the interconnect suspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.