Patent · US Active

Ion source crucible for solid feed materials

US10600611B2 · kind B2 · utility

10Cited by

7References

21Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Klaus Becker · Wetter, DE
Daniel Alvarado · Pflugerville, US
Michael St. Peter · Gloucester, US
Graham Wright · Newburyport, US

Key dates

Filing date	Nov 14, 2018
Grant date	Mar 24, 2020
Priority date	—
Expiry date	Nov 14, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/082
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An ion source with a crucible is disclosed. In some embodiments, the crucible is disposed in one of the ends of the ions source, opposite the cathode. In other embodiments, the crucible is disposed in one of the side walls. A feed material, which may be in solid form is disposed in the crucible. In certain embodiments, the feed material is sputtered by ions and electrons in the plasma. In other embodiments, the feed material is heated so that it vaporizes. The ion source may be oriented so that the crucible is disposed in the lowest wall so that gravity retains the feed material in the crucible.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.