Drive control method of drive stage device
US10605583B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2018 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Oct 18, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01G19/083
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a control method of a drive stage device, a stage is floated on an air bearing, then a height of the stage while floating on the air bearing is measured as a first height. A work piece is placed on the stage and a height of the stage while holding the work piece is measured as a second height. A difference between the first height and the second height is calculated as a drop amount, and a weight of the work piece is calculated based on the drop amount. An upper limit speed of one of rotational drive and horizontal movement of the stage is determined based on the calculated work piece weight. A speed of the one of the rotational drive and the horizontal movement of the stage is controlled so as to not exceed the upper limit speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.