Patent · US Active

Semiconductor device having a drain electrode contacting an epi material inside a through-hole and method of manufacturing the same

US10608102B2 · kind B2 · utility

0Cited by
2References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 20, 2018
Grant dateMar 31, 2020
Priority date
Expiry dateSep 20, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8503
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Provided is a semiconductor device including a substrate in which an insulation layer is disposed between a first semiconductor layer and a second semiconductor layer, a through-hole penetrating through the substrate, the through-hole having a first hole penetrating through the first semiconductor layer and a second hole penetrating through the insulation layer and the second semiconductor layer from a bottom surface of the first hole, an epi-layer disposed inside the through-hole, a drain electrode disposed inside the second hole and contacting one surface of the epi-layer, and a source electrode and a gate electrode which are disposed on the other surface of the epi-layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.