Systems and methods for high energy X-ray detection in electron microscopes
US10614997B2 · kind B2 · utility
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1References
20Claims
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Key dates
| Filing date | Aug 3, 2018 |
| Grant date | Apr 7, 2020 |
| Priority date | — |
| Expiry date | Aug 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for collecting information from a sample, the system includes an X-ray detector configured to mount to an electron microscope, the X-ray detector including a detection tip with a detection material positioned in the detection tip. The detection material includes a compound semiconductor material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.