Patent · US Active

Electron beam microscope

US10615000B2 · kind B2 · utility

0Cited by

9References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Luyang Han · Heidenheim, DE
Joerg Fober · Heubach, DE
Stefan Meyer · Langensendelbach, DE
Wolfgang Berger · Benediktbeuern, DE

Key dates

Filing date	Mar 26, 2019
Grant date	Apr 7, 2020
Priority date	—
Expiry date	Mar 26, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2482
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.