Photoacoustic gas analyzer for determining species concentrations using intensity modulation

US10620165B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• David Tumpold · Tauberbischofsheim, DE
• Gueclue Onaran · Munich, DE
• Christoph Glacer · Munich, DE

Key dates

• Filing date: Dec 29, 2016
• Grant date: Apr 14, 2020
• Expiry date: Jun 17, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/02809
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A photoacoustic gas analyzer including a gas chamber to receive a gas sample, a radiation source to emit an electromagnetic radiation adapted to excite N different types of gas molecules in the gas sample, the concentrations of which are to be determined, an acoustic-wave sensor to detect acoustic waves generated by the irradiated gas, and a control unit. The control unit controls the radiation source to emit electromagnetic radiation with a time-varying intensity and to modulate the frequency at which the intensity is varied with a modulation signal having at least N different values, to receive from the acoustic-wave sensor signals indicative of acoustic waves generated by the irradiated gas, to determine at least N mutually different signal amplitudes each associated with a respective N mutually different frequencies at which the intensity of the emitted electromagnetic radiation is varied, and to determine the concentrations of the N different gas types.