Patent · US Active

System and method for fault isolation by emission spectra analysis

US10620263B2 · kind B2 · utility

0Cited by

18References

20Claims

0Family size

Assignee

FEI EFA, Inc. · US

Inventors

Herve Deslandes · Sunnyvale, US
Prasad Sabbineni · San Ramon, US
Regina Freed · Los Altos, US

Key dates

Filing date	Jul 3, 2018
Grant date	Apr 14, 2020
Priority date	—
Expiry date	Jul 3, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/956
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus and method for optical probing of a DUT is disclosed. The system enables identifying, localizing and classifying faulty devices within the DUT. A selected area of the DUT is imaged while the DUT is receiving test signals, which may be static or dynamic, i.e., causing certain of the active devices to modulate. Light from the DUT is collected and is passed through a rotatable diffracting element prior to imaging it by a sensor and converting it into an electrical signal. The resulting image changes depending on the rotational positioning of the grating. The diffracted image is inspected to identify, localize and classify faulty devices within the DUT.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.