Method for creating vacuum in load lock chamber
US10627728B2 · kind B2 · utility
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11References
18Claims
0Family size
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Key dates
| Filing date | Jun 14, 2017 |
| Grant date | Apr 21, 2020 |
| Priority date | — |
| Expiry date | Oct 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for creating a vacuum in a load lock chamber is provided. The method includes building an air-tight environment in the load lock chamber. The method further includes reducing the pressure in a gas tank to a predetermined vacuum pressure. The method also includes enabling an exchange of gas between the load lock chamber and the gas tank when the pressure in the gas tank is at the predetermined vacuum pressure so as to reduce the pressure in the load lock chamber to an adjusted vacuum pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.