Yu-Fu Lin
14Patents
3h-index
24Co-inventors
60Inventor score
Filing activity: Aug 9, 2004 → May 24, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8518634B2 | Cleaning process for semiconductor device fabrication | Electricity | 5 | Active |
| US10156794B1 | Positioning device for aligning semiconductor tool and overhead hoist transport system | Electricity | 4 | Active |
| US7098978B2 | Wide-viewing angle liquid crystal display | Physics | 3 | Expired |
| US11054756B2 | Apparatus and method for cleaning reticle stage | Physics | 1 | Active |
| US11370062B2 | Multifunctional shaft apparatus | Physics | 0 | Active |
| US10983447B2 | Exhaust system with u-shaped pipes | Emerging Cross-Sectional Technologies | 0 | Active |
| US12276923B2 | Exhaust system with U-shaped pipes | Emerging Cross-Sectional Technologies | 0 | Active |
| US8544317B2 | Semiconductor processing apparatus with simultaneously movable stages | Electricity | 0 | Active |
| US11681232B2 | Exhaust system with u-shaped pipes | Emerging Cross-Sectional Technologies | 0 | Active |
| US11994809B2 | Exhaust system with u-shaped pipes | Emerging Cross-Sectional Technologies | 0 | Active |
| US10684559B2 | Apparatus and method for cleaning reticle stage | Physics | 0 | Active |
| US10792767B2 | Laser preheating control method and device | Performing Operations; Transporting | 0 | Active |
| US9640397B2 | Method of fabricating a semiconductor integrated circuit using a directed self-assembly block copolymer | Electricity | 0 | Active |
| US10627728B2 | Method for creating vacuum in load lock chamber | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.