Inventor · Hsinchu, TW

Yu-Fu Lin

14Patents
3h-index
24Co-inventors
60Inventor score

Filing activity: Aug 9, 2004 → May 24, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US8518634B2 Cleaning process for semiconductor device fabrication Electricity 5 Active
US10156794B1 Positioning device for aligning semiconductor tool and overhead hoist transport system Electricity 4 Active
US7098978B2 Wide-viewing angle liquid crystal display Physics 3 Expired
US11054756B2 Apparatus and method for cleaning reticle stage Physics 1 Active
US11370062B2 Multifunctional shaft apparatus Physics 0 Active
US10983447B2 Exhaust system with u-shaped pipes Emerging Cross-Sectional Technologies 0 Active
US12276923B2 Exhaust system with U-shaped pipes Emerging Cross-Sectional Technologies 0 Active
US8544317B2 Semiconductor processing apparatus with simultaneously movable stages Electricity 0 Active
US11681232B2 Exhaust system with u-shaped pipes Emerging Cross-Sectional Technologies 0 Active
US11994809B2 Exhaust system with u-shaped pipes Emerging Cross-Sectional Technologies 0 Active
US10684559B2 Apparatus and method for cleaning reticle stage Physics 0 Active
US10792767B2 Laser preheating control method and device Performing Operations; Transporting 0 Active
US9640397B2 Method of fabricating a semiconductor integrated circuit using a directed self-assembly block copolymer Electricity 0 Active
US10627728B2 Method for creating vacuum in load lock chamber Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.