Specimen preparation and inspection in a dual-beam charged particle microscope
US10629409B2 · kind B2 · utility
2Cited by
0References
20Claims
0Family size
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Key dates
| Filing date | Jul 16, 2018 |
| Grant date | Apr 21, 2020 |
| Priority date | — |
| Expiry date | Jul 16, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of preparing a specimen in a dual-beam charged particle microscope having:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.