X-ray fluorescence apparatus for contamination monitoring

US10634628B2 · kind B2 · utility

Assignee

• Bruker Technologies Ltd. · IL

Inventors

• Nikolai Kasper · Rheinzabern, DE
• Juliette P. M. van der Meer · Karlsruhe, DE
• Elad Yaacov Schwarcz · Givatayim, IL
• Matthew Wormington · Littleton, US

Key dates

• Filing date: May 31, 2018
• Grant date: Apr 28, 2020
• Expiry date: Nov 6, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/12
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for X-ray measurement, includes an X-ray source, an X-ray detector, an optical inclinometer, and a processor. The X-ray source is configured to generate and direct an X-ray beam to be incident at a grazing angle on a surface of a sample. The X-ray detector is configured to measure X-ray fluorescence emitted from the surface of the sample in response to being excited by the X-ray beam. The optical inclinometer is configured to measure an inclination of the surface of the sample. The processor is configured to calibrate the grazing angle of the X-ray beam based on the measured inclination, and to further fine-tune the grazing angle based on the X-ray fluorescence measured by the X-ray detector.