Bruker Technologies Ltd.
16Patents
16Active
16Granted
54Portfolio score
Filing activity: Jan 5, 2017 → Apr 27, 2023
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10976270B2 | X-ray detection optics for small-angle X-ray scatterometry | Physics | 19 | Active |
| US10634628B2 | X-ray fluorescence apparatus for contamination monitoring | Electricity | 18 | Active |
| US10816487B2 | Image contrast in X-ray topography imaging for defect inspection | Physics | 12 | Active |
| US11181490B2 | Small-angle x-ray scatterometry | Electricity | 5 | Active |
| US11781999B2 | Spot-size control in reflection-based and scatterometry-based X-ray metrology systems | Electricity | 1 | Active |
| US10684238B2 | Method and apparatus for X-ray scatterometry | Electricity | 1 | Active |
| US10976268B2 | X-ray source optics for small-angle X-ray scatterometry | Physics | 1 | Active |
| US11703464B2 | Small-angle x-ray scatterometry | Electricity | 0 | Active |
| US10976269B2 | Wafer alignment for small-angle x-ray scatterometry | Physics | 0 | Active |
| US12078604B2 | Monitoring properties of X-ray beam during X-ray analysis | Physics | 0 | Active |
| US12249059B2 | Navigation accuracy using camera coupled with detector assembly | Physics | 0 | Active |
| US11169099B2 | Method and apparatus for X-ray scatterometry | Electricity | 0 | Active |
| US12085521B2 | Small-angle X-ray scatterometry | Electricity | 0 | Active |
| US12339239B2 | X-ray diffraction imaging detector having multiple angled input faces | Physics | 0 | Active |
| US11302508B2 | X-ray tube | Electricity | 0 | Active |
| US11761913B2 | Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.