Patent assignee · IL · COMPANY

Bruker Technologies Ltd.

16Patents
16Active
16Granted
54Portfolio score

Filing activity: Jan 5, 2017 → Apr 27, 2023

Most-cited patents

PatentTitleAreaCited byStatus
US10976270B2 X-ray detection optics for small-angle X-ray scatterometry Physics 19 Active
US10634628B2 X-ray fluorescence apparatus for contamination monitoring Electricity 18 Active
US10816487B2 Image contrast in X-ray topography imaging for defect inspection Physics 12 Active
US11181490B2 Small-angle x-ray scatterometry Electricity 5 Active
US11781999B2 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems Electricity 1 Active
US10684238B2 Method and apparatus for X-ray scatterometry Electricity 1 Active
US10976268B2 X-ray source optics for small-angle X-ray scatterometry Physics 1 Active
US11703464B2 Small-angle x-ray scatterometry Electricity 0 Active
US10976269B2 Wafer alignment for small-angle x-ray scatterometry Physics 0 Active
US12078604B2 Monitoring properties of X-ray beam during X-ray analysis Physics 0 Active
US12249059B2 Navigation accuracy using camera coupled with detector assembly Physics 0 Active
US11169099B2 Method and apparatus for X-ray scatterometry Electricity 0 Active
US12085521B2 Small-angle X-ray scatterometry Electricity 0 Active
US12339239B2 X-ray diffraction imaging detector having multiple angled input faces Physics 0 Active
US11302508B2 X-ray tube Electricity 0 Active
US11761913B2 Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.