Patent · US Active

MEMS sensors, methods for providing same and method for measuring a fluid constituent

US10641626B2 · kind B2 · utility

10Cited by

4References

25Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Bretthauer · Munich, DE
Alfons Dehe · Reutlingen, DE
Prashanth Makaram · Berlin, DE
Abidin Güçlü Onaran · Austin, US
Arnaud Walther · Grenoble, FR

Key dates

Filing date	Aug 21, 2018
Grant date	May 5, 2020
Priority date	—
Expiry date	Aug 31, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/02809
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In accordance with an embodiment, a MEMS sensor includes a membrane that is suspended from the substrate, a resonant frequency of said membrane being influenced by an ambient pressure that acts on the membrane; and an evaluation device configured to perform a first measurement based on the resonant frequency of the membrane to obtain a measurement result, where the evaluation device is configured to at least partly compensate an influence of the ambient pressure on the measurement result.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.