Methodology to generate a guiding template for directed self-assembly
US10642152B2 · kind B2 · utility
0Cited by
1References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2014 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Nov 19, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2119/18
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout for lithography, the feature guiding template including at least two portions joined by a bottleneck, the method including determining a characteristic of the feature guiding template based on at least a function of geometry of the feature guiding template including a value of a first width of at least one of the portions, a value of a second width of the bottleneck, or a value based on both the first width and the second width.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.