Ceramic ring with a ladder structure
US10643882B2 · kind B2 · utility
0Cited by
2References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2017 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Aug 18, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.