Patent · US Active

Vacuum processing system and method for mounting a processing system

US10648072B2 · kind B2 · utility

2Cited by

3References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Florian RIES · Stuttgart, DE
Stefan Hein · Berlin, DE
Jurgen Henrich · Limeshain, DE
Andreas Sauer · Großostheim, DE

Key dates

Filing date	Apr 2, 2014
Grant date	May 12, 2020
Priority date	—
Expiry date	Jul 22, 2034

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/545
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A vacuum processing system for a flexible substrate is provided. The processing system includes a first chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a second chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a maintenance zone between the first chamber and the second chamber; and a first process chamber for depositing material on the flexible substrate, wherein the second chamber is provided between the maintenance zone and the first process chamber. The maintenance zone allows for maintenance access to at least one of the first chamber and the second chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.