Repeater defect detection
US10648925B2 · kind B2 · utility
2Cited by
12References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2017 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Jun 25, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.