Inventor · Sunnyvale, CA, US

Eugene Shifrin

30Patents
6h-index
60Co-inventors
68Inventor score

Filing activity: Feb 28, 2007 → Apr 30, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8041103B2 Methods and systems for determining a position of inspection data in design data space Physics 61 Active
US10217625B2 Continuous-wave laser-sustained plasma illumination source Electricity 9 Active
US9171364B2 Wafer inspection using free-form care areas Physics 8 Active
US9262821B2 Inspection recipe setup from reference image variation Physics 7 Active
US9927094B2 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Electricity 7 Active
US8698399B2 Multi-wavelength pumping to sustain hot plasma Emerging Cross-Sectional Technologies 6 Active
US10395358B2 High sensitivity repeater defect detection Emerging Cross-Sectional Technologies 6 Active
US9355208B2 Detecting defects on a wafer Physics 4 Active
US7894659B2 Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer Physics 3 Active
US9766186B2 Array mode repeater detection Physics 3 Active
US10648925B2 Repeater defect detection Physics 2 Active
US9766187B2 Repeater detection Physics 2 Active
US9709811B2 System and method for separation of pump light and collected light in a laser pumped light source Physics 2 Active
US9727047B2 Defect detection using structural information Electricity 2 Active
US10381216B2 Continuous-wave laser-sustained plasma illumination source Electricity 1 Active
US10887974B2 High efficiency laser-sustained plasma light source Electricity 1 Active
US8213705B2 Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer Physics 1 Active
US9734422B2 System and method for enhanced defect detection with a digital matched filter Physics 1 Active
US10714307B2 Neutral atom imaging system Electricity 0 Active
US11138722B2 Differential imaging for single-path optical wafer inspection Physics 0 Active
US10520741B2 System and method for separation of pump light and collected light in a laser pumped light source Physics 0 Active
US11204332B2 Repeater defect detection Physics 0 Active
US9053390B2 Automated inspection scenario generation Physics 0 Active
US10679909B2 System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer Physics 0 Active
US10714327B2 System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.