Patent · US Active

Method for manufacturing an acceleration sensor

US10648999B2 · kind B2 · utility

5Cited by

34References

13Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventor

Dirk Meinhold · Dresden, DE

Key dates

Filing date	Feb 20, 2018
Grant date	May 12, 2020
Priority date	—
Expiry date	Apr 30, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/03
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Various acceleration sensors are disclosed. In some cases, an inertial mass may be formed during back-end-of-line (BEOL). In other cases, a membrane may have a bent, undulated or winded shape. In yet other embodiments, an inertial mass may span two or more pressure sensing structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.